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Microsystem Technology and Microrobotics - Ulrich Rembold,Sergej Fatikow

Anglų
1997-03-20
190,56 € 254,08 €

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first ... Visas aprašymas

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Daugiau informacijos

Autorius Ulrich Rembold, Sergej Fatikow
Leidėjas Springer Berlin Heidelberg
Išleidimo metai 1997
Viršelio tipas Kieti viršeliai
EAN 9783540606581
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190,56 € 254,08 €