Center for Integrated Nanotechnologies (CINT): Science-Base for Future Integrated Systems.- An Analysis of the Different MEMS Companies-Business Models.- MicroNano Technology Services Offering New Market Opportunities To Industry.- International Country Rankings in Patented Nanotechnology.- Financing of MEMS/MOEMS and Nanotechnology in Germany.- Performance Analysis of Low Drift Micro-Machined Gyroscopes for Inertial Navigation Systems.- Nanoscale and Microsystem-Technology: New Approaches for Thermoelectric Devices.- Micromixer Module With an Integrated Optical Pressure Gauge.- Multi-Layer PMMA Microfluidic Systems for Ammonia Detection.- Nanoscale Materials meet Microsystems-Technology Metal Oxide Semiconductor Chemical Sensors: From a Simple Resistor to a Tunable Microelectronic Device.- The New Type Of Transducer For Gas And Bio-Sensors.- Frequency Changes in the Second Derivative of Currant - Voltage Characteristics of SnO2-Si the Heterostructures During Gas Adsorption for Different Thickness of the Adsorptive Layers.- Light Processing with Electrostatically Driven Micro Scanning Mirrors and Micro Mirror Arrays.- New Combination of SiGe RF Amplifier ICs with High-O MEMS Components for Wireless Communication Radio Transceivers.- Design and Realisation of an Add-Drop Multiplexer Using Digital Micromirror.- Functionalization of Cantilever Array Sensors Using InkJet Deposition.- Optimized Creation of Monolayers for Parallel Readout of Bead-Based Assays.- Integrating Molecular Structures into the Macroscopic World by a Combination of Microsystem Technology and Self-Assembly Methods.- Nanoimprinting-a Key Enabling Technology for BioMEMS and Biomedical Applications.- Coriolis-lnduced Flow Control for Micro- and Nanofluidic Lab-on-a-Disk Technologies.- One Dimensional Microarrays for Genetic Testing and Diagnostics.- SEMI International Standards Program-Focus on MEMS.- Extreme Ultraviolet Radiation from Pulsed Discharges: A New Access to "Nanoscopy" and "Nanolytics".- Four Point Bending Test of Thin Films in the nm Through to ?rn Range.- Methods for Reconstruction of Atomic Force Microscope Data Based on Morphological Image Processing.- Optical 3D-Micro Structure Measurement System Based on a Laser Scanning Confocal Microscope.- Adsorption Sensitivity of Microporous Silicon to Organic and Biomolecules with High Dipole Moment.- Nanoengineered Inorganic/Organic Composite Microcapsules.- Mounting at the Nanoscale by Addressing Nanostructured Biological Templates - Another Packaging Strategy for Nanoscaled Electronics?.- New Functional Materials for MicroNano Fabrication and Devices.- Nanoscalic Sol-Gel-Fillers in Fibre-Chip-Adhesives.- Multilayers and Multicomponents-Layers Produce in Atmosphere of Metalloorganic Compounds of Aluminum in Arc Plasma Discharge of Titanium-New Technology MO PVD-Arc.- Nanomanipulations in the Optical Near Field.- Highly Efficient Micro Structuring of Metals, Ceramics and Dielectrics with Nd: YAG and Excimer Lasers.- Manufacturing Engineering for Nanoproduction.- Compact Laboratory EUV-Lamp: "In-House Beamlines" for Technologies Based on Extreme Ultraviolet Radiation.- Laboratory for Machine Tools and Production Technology: A Novel Assembly Method for Chip/Wafer Bumping and MEMS Integration.- Microcontroller Modules for the Modular MEMS Framework MATCH-X.- Microreliability, Nanoreliability-lssues for MEMS.- Cost Savings with Micro / Nano-Replication.- Feasibility Study of the Fabrication of 2D Polymer Photonic Crystals by X-Ray Lithography.- Behaviour of Flexible Hinges for Use as Articulations in High Precision Mechanisms.- Design Optimisation Applied To A Cantilever Type Piezoresistive Accelerometer.- Design and Implementation of a Flexible Guiding System in Translation.- Appendix: List of Contributors.