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Ion Sources - Huashun Zhang

Anglų
1999-11-08
264,25 € 406,54 €

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Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics ... Visas aprašymas

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Aprašymas

Ion implantation has become a basic technology in device manufacturing. For efficient use of this accelerator-based technique the choice of appropriate ion sources is important. This book deals with the design and operation of ion sources. Additionally the physics of ion formation of the various elements with different charge states and charge neutralization are discussed. Ion selection and beam diagnostics are part of the book too. The presentation of the necessary equations and diagrams for the various parameters makes this book useful as a handbook for ion sources.

Daugiau informacijos

Autorius Huashun Zhang
Leidėjas Springer Berlin Heidelberg
Išleidimo metai 1999
Viršelio tipas Kieti viršeliai
EAN 9783540657477
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264,25 € 406,54 €