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Germanium Surface Preparation Methods - Jungyup Kim

Anglų
2008-01-01
65,23 € 100,36 €

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Germanium is gaining interest in the semiconductor industry as a replacement channel material for high mobility applications. Con-tamination directly affects the device performance, yield and reliability. Therefore, continued device scaling is dependent on effective surface preparation including effective contamination and particle removal of germanium surface. Cleaning and preparation methods for silicon s ... Visas aprašymas

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Aprašymas

Germanium is gaining interest in the semiconductor industry as a replacement channel material for high mobility applications. Con-tamination directly affects the device performance, yield and reliability. Therefore, continued device scaling is dependent on effective surface preparation including effective contamination and particle removal of germanium surface. Cleaning and preparation methods for silicon surface have been extensively developed over the past few decades. Germanium surface cleaning and preparation is at its infancy and is markedly different from that of silicon. This book examines these differences and fundamentals involved in germanium surface cleaning. This book also proposes methods for basic germanium surface cleaning and the basis for further process develop-ment for professionals involved in surface cleaning of semiconductor materials.

Daugiau informacijos

Autorius Jungyup Kim
Leidėjas AV Akademikerverlag GmbH & Company KG
Išleidimo metai 2008
Viršelio tipas Minkšti viršeliai
EAN 9783836484114
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65,23 € 100,36 €